Cleanroom Design Criteria

Written By Rijomac on Monday, June 16, 2014 | 6:30 PM

CLEAN ROOM DESIGN CRITERIA
Criteria	Class Limits
	10	100	1000	10000	100000
Air Changes Per Hour	600	300 – 480	150 - 250	60 – 120	10 - 40
Hepa Filter Coverage %	100	70 – 100%	30 – 60%	10 – 30%	5 – 10%
CFM PerSQ/FT	90	65-36	32-18	16-9	8-5
Typical Filter Velocity	99,9997	99,997	99,997	99,997	99,97
Typical Velocity Filter	60 – 110 FPM	50 -  90 FPM	40 – 90 FPM	25 – 40 FPM	10 – 30 FPM
Air Flow Type	Unidirectional	Unidirectional	Mixed	Mixed	Mixed
Typical Return Air System	Raised Floor	Low Wall	Low Wall	Low Wall & Ceiling	Low Wall & Ceiling

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